APA   Click to copy
Tobin, K., Gleason, S., Karnowski, T., Sari-Sarraf, H., & Bennett, M. (1996). Image paradigm for semiconductor defect data reduction. Advanced Lithography.

Chicago/Turabian   Click to copy
Tobin, K., S. Gleason, T. Karnowski, H. Sari-Sarraf, and M. Bennett. “Image Paradigm for Semiconductor Defect Data Reduction.” Advanced Lithography (1996).

MLA   Click to copy
Tobin, K., et al. “Image Paradigm for Semiconductor Defect Data Reduction.” Advanced Lithography, 1996.

@article{k1996a,
  title = {Image paradigm for semiconductor defect data reduction},
  year = {1996},
  journal = {Advanced Lithography},
  author = {Tobin, K. and Gleason, S. and Karnowski, T. and Sari-Sarraf, H. and Bennett, M.}
}